Figure 2: Optimization of surface regeneration procedure (a) siloxane bond lysis at various acid (HCl), (b) various O2 plasma, and (c) their combined strengths as a function of exposure time (min). Thickness for each set was monitored using ellipsometry as depicted in‘d’. (e) Evaluation of areal density of APTES on bare, APTES-functionalized and regenerated Au surfaces by Rutherford back scattering (RBS). Error bars are standard deviation.