Figure 1: a) Schematic diagram of the ultra-high vacuum compatible system and the nanocluster source. b) TEM image of the Pd nanoclusters c) Nanocluster size distribution measured using the QMF. The nanoclusters were produced using fAr = 90 sccm, fHe = 0 sccm, 7 = 90 mm, and P = 85 W.