Spatially resolved analytical techniques

Detection limit

Spatial resolution

Selectivity

Quantification

Analytical depth

EDS (X-ray Energy Dispersive Spectrometry

100 to 1000 µg/g

0.5 µm

Multielemental (Z≥6)

Quantitative

0.1 – 1 µm

PIXE (Particle Induced X-ray emission)

1 to 10 µg/g

0.2 – 2 µm

Multielemental (all Z)

Quantitative

10 - 100  µm

SXRF (Synchrotron radiation X-ray fluorescence)

< 0.1 µg/g

0.1 – 2 µm

Multielemental (Z≥6)

Quantitative

>100 µm

XAS (X-ray Absorption Spectroscopy)

100 µg/g

1 µm

Chemical species

Quantitative

>100 µm

Secondary Ion Mass Spectrometry (SIMS)

0.1 µg/g

0.05 µm

Multielemental and Isotopic

Semi-quantitative

0.1 µm