Figure 1: (A) A micropillar filter chip image which contains three devices, filter 2 was used for this experiment being 4300 μm wide, 7300 μm long and 300 μm deep. (B) Scanning electron microscope images of the Si μPF fabricated using deep reactive ion etch, showing a tilted view of the cylinder-shaped micropillars and (C) a magnified view of micropillars array.