Molar concentration
Grain size (D) (nm)
Micro strain εx10
-3
Dislocation Density x10
14
(m
-2
)
Inter planar spacing (nm)
0.05 M
27
1.05
13.8
0.266
0.1 M
48
0.76
4.4
0.262
0.15 M
27
1.32
13.3
0.245
Table 3:
Grain size, Micro strain, Dislocation density and Inter-planar spacing of In
2
O
3
films deposited at different molarities
