Molar concentration Grain size (D) (nm) Micro strain εx10-3 Dislocation Density x1014 (m-2) Inter planar spacing (nm)
0.05 M 27 1.05 13.8 0.266
0.1 M 48 0.76 4.4 0.262
0.15 M 27 1.32 13.3 0.245
Table 3: Grain size, Micro strain, Dislocation density and Inter-planar spacing of In2O3 films deposited at different molarities