Temperature
(in°C)
Grain size D(nm) Micro strain ε x10-3 Dislocation Density δ x1014(m-2) Inter planar spacing(nm)
350 35.901 1.01 7.758 0.250
400 34.584 1.05 8.360 0.244
450 47.167 0.77 4.494 0.258
500 47.750 0.76 4.385 0.262
550 36.324 1.0 7.578 0.244
Table 4: Grain size, Micro strain, Dislocation density, Inter-planar spacing of In2O3 films deposited at different temperatures