Heating t
emp. (
℃
)
500 ~ 1000
TiO
2
sample (g)
0.8
Ar : H
2
gas
(sccm)
20 : 20
Treatment time (min)
40
Reactor p
ressure (Pa)
300
Plasma input power
(W)
90
Table 1:
Experimental conditions for the partial reduction of TiO
2