Temperature
(in°C)
Grain size D(nm)
Micro strain ε
x10
-3
Dislocation Density δ x10
14
(m
-2
)
Inter planar spacing(nm)
350
35.901
1.01
7.758
0.250
400
34.584
1.05
8.360
0.244
450
47.167
0.77
4.494
0.258
500
47.750
0.76
4.385
0.262
550
36.324
1.0
7.578
0.244
Table 4: Grain size, Micro strain, Dislocation density, Inter-planar spacing of In2O3 films deposited at different temperatures
