Nanometrology is one of the field of metrology, concerned with the science of measurement at the nanoscale level. Nanometrology has a important role in order to produce nanomaterials and devices with a reliability and high degree of accuracy in nanomanufacturing. A challenge in this field is to improve a new measurement techniques and standards to fulfil the needs of future generation advanced manufacturing, which will rely on nanometer scale materials and technologies. The requirements for measurement and characterization of new sample structures and characteristics far exceed the abilities of current measurement science.
- Atomic force microscopy
- Scanning tunnelling microscope
- Electron Microscope
- Super Resolution Microscopy