Measurement of Piezoelectric Properties of Pulsed Laser Deposited Hydroxyapatite Thin Films on Platinum or Titanium Substrate
Tsutomu Nishigaki*, Hiroaki Nishikawa, Masanobu Kusunoki and Shigeki Hontsu
Faculty of Biology-Oriented Science and Technology, Kinki University, 930 Nishimitani, Kinokawa, Wakayama 649-6493, Japan
- Corresponding Author:
- Tsutomu Nishigaki
Faculty of Biology-Oriented Science and Technology
Kinki University, 930 Nishimitani
Kinokawa, Wakayama 649-6493, Japan
E-mail: [email protected]
Received date: June 08, 2013; Accepted date: July 23, 2013; Published date: August 23, 2013
Citation: Nishigaki T, Nishikawa H, Kusunoki M, Hontsu S (2013) Measurement of Piezoelectric Properties of Pulsed Laser Deposited Hydroxyapatite Thin Films on Platinum or Titanium Substrate. Bioceram Dev Appl S1:008. doi:10.4172/2090-5025.S1-008
Copyright: © 2013 Nishigaki T, et al. This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
In order to measure the piezoelectric properties of the Hydroxyapatite (HAp) films, we have fabricated Cu/HAp/Ti or Cu/HAp/Pt structure. At first, a 1.5 m thick HAp was deposited on a Ti or Pt substrate using the KrF Pulsed Laser Deposition (PLD) method. After the HAp deposition, the HAp film was crystallized by post-annealing in nitrogen gas atmosphere and cooled slowly in an electric furnace. Then, a Cu top electrode sheet was attached on HAp film. Finally, one end of the Cu/HAp/Ti or Cu/HAp/Pt structure was clamped to compose a vibrating cantilever beam. Piezoelectric coefficients were estimated by output voltage responses of HAp films measured by a operational amplifier circuit when the Cu/HAp/Ti or Cu/HAp/Pt beam was excited by a mini-shaker at the first natural frequency of the beam. The results showed the piezoelectricity of the artificially synthesized HAp films.