Journal of Chemical Engineering & Process Technology
Open Access

Abstract

Understanding the Compatibility of Thermal Mass Flow Meter with Various Process Gases

Sashi Kumar GN, Mahendra AK and Gouthaman G

A majority of vacuum processes use the Thermal Mass Flow Meter (TMFM) as metering device for process gas. The purpose of this paper is to establish cross compatibility relationship of the TMFM with different process gases. This paper uses a compressible Computational Fluid Dynamic (CFD) solver to understand the behavior of TMFM with different process gases. The change in the characteristic curve at lower pressures has also been studied. Empirical correlations have been developed so that the change in characteristic curve of TMFM can be predicted accurately for different gases based on their physical properties.