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The flexible and biocompatible properties of polymeric material make polymer MEMS promising for next generation of
micro devices. However, there are many difficulties in the fabrication process. Supercritical carbon dioxide (sc-CO
) is an
intermediate media between gas and liquid and has low viscosity like gas and high density like liquid. We have studied applications
into fabrication of integrated circuit, MEMS and bio-sensing devise.
We examined sc-CO
for washing of photoresist pattern of SU-8 and have completed washing the patterns with strengthening
the adhesion between SU-8 and substrate. This strengthening is effective but we also have to remove the pattern from the
substrate. Thus we have proposed a new washing process using emulsion of sc-CO
in water for eliminating the resist patterns
and found that this application of the emulsion is effective. We have also studied metalizing of Ni-P on polyimide, which is
composed of catalyzation process on/into polymer using sc-CO
solution of Pd-organic catalysts and electroless plating using
emulsion with sc-CO
in electroless plating electrolyte. The electroless plating process enabled the penetration of Ni-P into deep-
inside of polymer and give strong adhesion between polymer and metal. Moreover, electroplating using emulsion with sc-CO
electroplating electrolyte realized wiring of Cu into fine nano-scale hole with high aspect ratio because of high diffusivity of the
electrolyte. Thus the application of sc-CO
can realize an innovation for fabrication of MEMS or bio-sensing devise.
Masato Sone completed his Ph.D. in Engineering at the age of 28 years at Tokyo Institute of Technology. He worked as a researcher in Nippon
Oil Co. Ltd. from 1996 to 2000. He was an assistant professor and then a research at Tokyo University of Agriculture and Technology from 2000
to 2005 and he got the position of Associate Professor at Tokyo Institute of Technology from 2005 until present time. He has published more than
100 research papers in international journals, 9 books and 29 patents including USP and EP. He majorities are microelectronics, surface finishing,
material science and polymer science.
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