alexa IC Fabrication-Compatible Processing for Instrumentation and Measurement Applications
Engineering

Engineering

Journal of Electrical & Electronic Systems

Author(s): Davey D L Wijngaards, Reinoud F Wolffenbuttel

Abstract Share this page

The solid-state sensor field is maturing and an increasing number of applications is being served. Nevertheless, the available infrastructure and technology have found only few applications within the field of instrumentation and measurement (I&M). Therefore, the aim of this paper is threefold: 1) to categorize the various sensor processing strategies that are available; 2) to provide a representative overview of what different silicon sensor processing techniques are available; and 3) to point out their potential for use in metrological applications. To this end, a number of examples of (potentially) successful micromachined devices for metrology are discussed. The key considerations in this application area are: 1) the mechanical material properties of silicon and 2) the on-chip cointegration of the entire reference system.

  • To read the full article Visit
  • Open Access
This article was published in IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT and referenced in Journal of Electrical & Electronic Systems

Relevant Expert PPTs

Relevant Speaker PPTs

Recommended Conferences

Relevant Topics

Peer Reviewed Journals
 
Make the best use of Scientific Research and information from our 700 + peer reviewed, Open Access Journals
International Conferences 2017-18
 
Meet Inspiring Speakers and Experts at our 3000+ Global Annual Meetings

Contact Us

 
© 2008-2017 OMICS International - Open Access Publisher. Best viewed in Mozilla Firefox | Google Chrome | Above IE 7.0 version
adwords