alexa Measurements of reactive ion etching process effect using long-period fiber gratings.
Engineering

Engineering

Journal of Biosensors & Bioelectronics

Author(s): mietana M, Koba M, Mikulic P, Bock WJ

Abstract Share this page

Abstract The paper presents for the first time a study of long-period fiber gratings (LPFGs) applied for the measurements of reactive ion etching (RIE) process effect in various places of a plasma reactor. For the purposes of the experiment a number of highly sensitive LPFGs working at the dispersion turning point was fabricated using electric arc discharges. We show that the LPFGs allow for monitoring of the phenomena taking place in the reactor, especially those resulting in reduction of the LPFG diameter. Results of the measurements supported by simulations have shown that etching rate significantly decreases with elevation of the sample up to 3.6 mm over the electrode in the reactor, and stays constant above this height.
This article was published in Opt Express and referenced in Journal of Biosensors & Bioelectronics

Relevant Expert PPTs

Relevant Speaker PPTs

Recommended Conferences

Relevant Topics

Peer Reviewed Journals
 
Make the best use of Scientific Research and information from our 700 + peer reviewed, Open Access Journals
International Conferences 2017-18
 
Meet Inspiring Speakers and Experts at our 3000+ Global Annual Meetings

Contact Us

 
© 2008-2017 OMICS International - Open Access Publisher. Best viewed in Mozilla Firefox | Google Chrome | Above IE 7.0 version
adwords