m/z assignment Secondary ion Yield
(Normalized counts)
Ratio
image
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23 
29 
43 
45 
57 
59 
73 
91 
105 
147 
207 
415 

H+
Na+
C2H5+
C3H7+, CH3Si+
CH5Si+
C4H9+
C2H7Si+
C3H9Si+
C7H7+
C8H9+
C5H15OSi2+
C6H19Si3O2+
C30H54+   
―  
215  
229 
574 
800  
300  
513  
6268  
121  
530  
942 
228 
910 
40   
2   
22   
32   
3   
23   
2   
12   
9   
30   
7   
―   
5   
―    
108    
10    
18    
267    
13    
257    
522    
13    
18    
134   
―   
182    
Table 1: Intensity of major fragment peaks of DDB for Ar1550 + and Ar+ bombardment
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