climate-change-2016_posters-accepted-abstracts

14 / 34

Notes:
Page 134
Climate Change 2016
October 27-29, 2016
Volume 7, Issue 9(Suppl) J Earth Sci Clim Change
ISSN: 2157-7617 JESCC, an open access journal
conferenceseries .com
October 24-26, 2016 Valencia, Spain
World Conference onClimate Change
Destruction of removal efficiency measuring methodology of POU scrubber for semiconductor and
electronics industries
Woo Chan Lee1, Kyoon Duk Yoon1 and Byung Chul Shin2
1Korea Testing Laboratory, Korea
2GreenConTech, Korea
One objective of this paper is to develop the more reliable measuring method of the fluorinated greenhouse gas (F-GHG)
abatement system. F-GHG from etching and CVD process of semiconductor or electronic industries can be decomposed
by point-of-use (POU) scrubber such as heat-wet, burn-wet, catalyst-wet, plasma-wet type scrubber and so on. The reduction
amount of F-GHG can be calculated exactly by the continuous on-line monitoring systems at inlet and outlet of the abatement
facility. However, the direct measuring methods of gas flow rate and F-GHG concentration require an expensive monitoring
system and high operation cost. It is possible to calculate the reduction amount of F-GHG more accurately based on Tier 2 if
we measure the reliable destruction efficiency of F-GHG with high accuracy. The current guidelines as a practical and reliable
method for measuring DREs of the abatement systems of PFC gases during the manufacturing of electronic products are based
on steady state condition. The steady state cannot be attained actually in most electronic manufacturing process because of
the cyclic operation of F-GHG emitting lines such as etching or CVD process. The typical pattern of gas flow rate and F-GHG
concentration from semiconductor industry is studied. It is advisable to determine the destruction efficiency of the abatement
system based on total inlet and outlet amount of F-GHG during repeated representative cyclic operation.
Biography
Woo Chan Lee has completed his PhD in Environmental Engineering from University of Seoul. Currently, he is carrying out the performance evaluation of the air
pollution control process and waste management system at Korea Testing Laboratory. He has published more than 5 papers in reputed journals.
Woo Chan Lee et al., J Earth Sci Clim Change 2016, 7:9(Suppl)