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conferenceseries
.com
Volume 8, Issue 10 (Suppl)
J Earth Sci Clim Change, an open access
ISSN: 2157-7617
Climate Change 2017
October 19-21, 2017
CLIMATE CHANGE
October 19-21, 2017 | Rome, Italy
4
th
World Conference on
Emission reduction of non-degradable and non-CO
2
greenhouse gas: Efficient destruction of CF
4
in
an excess enthalpy combustor
Dae Keun Lee, Seung Gon Kim
and
Dong-Soon Noh
Korea Institute of Energy Research, South Korea
Background
: CF
4
(tetrafluoromethane) being widely used as a cleaning and etching agent in semiconductor or display industry
has a large global warming potential. In addition, it is chemically stable so that it is hardly decomposed even below 1600℃ by
thermal methods. As it is usually utilized together with other explosive or toxic gases, it is diluted to around several thousands
of ppm by N
2
before being disposed of. This excessive dilution makes it difficult to destruct the waste gas effectively. In this
study, we developed an energy-efficient method of CF
4
destruction in an excess enthalpy combustor.
Experiment
: An excess enthalpy combustor is a sort of two-section porous medium burner; two silicon carbide honeycombs
with different cell sizes but with the same cylindrical shape were axially stacked. The emulated waste gas (CF
4
, N
2
) and the fuel-
oxidant (CH
4
, O
2
) were fully premixed before being supplied to the combustor. A reaction front of combustion was stabilized
around an interface between two honeycombs and the CF
4
inlet and outlet concentrations were measured by FTIR to determine
a destruction efficiency of CF
4
.
Findings
: As a representative result presented in Fig. 1 shows, 94.6% of CF
4
was destructed and chemically transformed to HF,
CO
2
, and H2Owhen the inlet CF
4
concentration was 2,150 ppmwith the fuel usage of 18 LPM. This fuel usage in the destructing
unit volume of CF
4
is much less than that of commercial abatement systems by about 30%. In addition, our combustor attained
much higher CF
4
destruction efficiency than the commercial systems.
Conclusion
: Our excess enthalpy combustor was found to have an advantage in reducing the greenhouse gas emissions, not
only of CF
4
but also of CO
2
via reduced fuel usage.
Biography
Dae Keun Lee is a Principal Researcher at Korea Research Institute of Energy Research (KIER). He received his PhD degree from Korea Advanced Institute of
Science and Technology (KAIST). His major concerns are fundamental understanding and practical applications of thermo-chemico and fluid dynamics, especially
including combustion, by using mathematical and experimental methods.
dklee@kier.re.krDae Keun Lee et al., J Earth Sci Clim Change 2017, 8:10(Suppl)
DOI: 10.4172/2157-7617-C1-037