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Volume 7, Issue 6(Suppl) J Chromatogr Sep Tech
ISSN: 2157-7064 JCGST, an open access journal
Page 54
Notes:
Separation Techniques 2016
September 26-28, 2016
conferenceseries.com
Separation Techniques
September 26-28, 2016 Valencia, Spain
2nd International Conference and Expo on
Nanoscale wiring by Cu electrodeposition in supercritical CO2 emulsified electrolyte with
continuous-flow reaction system
Masato Sone1, 2, Tso Fu Mark Chang1, 2, Tetsuya Shimizu1 and Nao Shinoda1
1Tokyo Institute of Technology, Japan
2Japan Science and Technology Agency, Japan
C opper wiring into nanoscale holes with high aspect ratio by electrodeposition is an important problem for 3-D integration
in integrated circuit technology toward miniaturization of electronic devices. However, void and pinhole found in Cu
wiring for the integration can cause trouble for miniature device. Cu electroplating method without void and pinhole is
needed. We have proposed novel electroplating methods with supercritical carbon dioxide (sc-CO2) emulsion (EP-SCE). The
electrochemical reaction is carried out in an emulsion of sc-CO2 in electrolyte with surfactants. Sc-CO2 has low viscosity
and compatibility of hydrogen. Thus, this method is applicable in fine Cu wiring. The aim of this report is to examine Cu
electrodeposition by using sc-CO2 emulsified electrolyte into nano-scale Cu wiring on the viewpoints of dissolution of Cu seed
layer, gap-filling capability into nano-scale holes and contamination in the plated Cu. Moreover a continuous-flow reaction
system is proposed and examined for filling of Cu into holes with 60 nm in diameter and aspect ratio of 2 and 5 by EP-SCE on
a round-type large-area hole test element group with diameter of 300 mm, which has an integrated structure of Cu seed layer
on TiN barrier layer sputtered on Si substrates.
Biography
Masato Sone has completed his Doctor degree of Engineering at Tokyo Institute of Technology. He has worked as a Researcher in Nippon Oil Company from 1996
to 2000. He was an Assistant Professor and then a Research Associate Professor at Tokyo University of Agriculture & Technology from 2000 to 2005, and became
an Associate Professor at Tokyo Institute of Technology in 2005 and working till date. He has published more than 127 papers in scientific journals and 18 books. His
majorities are microelectronics, surface finishing, chemical engineering, liquid crystal and polymer science. His recent research topic has been “Novel Nano Wiring
Process Using Supercritical Carbon Dioxide for Integrated Circuit Technology”.
Masato Sone et al., J Chromatogr Sep Tech 2016, 7:6(Suppl)