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Volume 7, Issue 6(Suppl) J Chromatogr Sep Tech
ISSN: 2157-7064 JCGST, an open access journal
Page 50
Notes:
Separation Techniques 2016
September 26-28, 2016
conferenceseries.com
Separation Techniques
September 26-28, 2016 Valencia, Spain
2nd International Conference and Expo on
High strength Au film fabricated by advanced electrochemical technique in supercritical CO2
emulsified electrolyte for MEMS accelerometers
Chun Yi Chen1, 2, Masaharu Yoshiba1, Haochun Tang1, Tso Fu Mark Chang1, 2, Daisuke Yamane1, 2, Katsuyuki Machida1, 2, 3, Kazuya Masu1, 2 and Masato
Sone1, 2
1Tokyo Institute of Technology, Japan
2Japan Science and Technology Agency, Japan
3NTT Advanced Technology Corporation, Japan
In recent years, Au has become promising material used as the movable structures and proof mass in micro-electrical-
mechanical system (MEMS) accelerometers, because the density of Au is about 10 times higher than that of silicon and the
sensitivity of the MEMS accelerometer can be improved with a reduction in the density. However, Au is known to be a soft
material and the mechanical strength becomes a concern in miniaturization of the MEMS device. One of the approaches is
to decrease the grain size of the Au material to increase the mechanical properties according to the Hall-Petch relation. Pulse
plating has been reported to be effective to fabricate metal films with finer grain, higher uniformity and lower porosity. On
the other hand, application of supercritical carbon dioxide (Sc-CO2) in electroplating of metal film has also received recent
research interests. Physical and transport properties such as density, viscosity, diffusivity and reactant solubility in Sc-CO2 can
be adjusted through control of pressure and temperature. Sc-CO2 is often used as a substitute or additive to control overall
physical and transport properties of the reaction medium. Surface tension and viscosity of Sc-CO2 are much lower than those
of aqueous solution. In this work, grain refinement, surface smoothening and compressive strength enhancement of Au films
were achieved by an electroplating using Sc-CO2 emulsified electrolyte.
Biography
Chun Yi Chen has completed her PhD from Tokyo Institute of Technology, Japan. She was a Research Assistant Professor for next generation battery project in
Waseda University from 2012 to 2015. She is currently a Research Assistant Professor of Precision and Intelligence Laboratory in Tokyo Institute of Technology,
focusing on advanced electrochemical technique for biomedical materials and devices. She has published many papers in reputed journals and received 6 awards
from the international conferences.
Chun Yi Chen et al., J Chromatogr Sep Tech 2016, 7:6(Suppl)