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Microlithography is defined as capable of structuring material on a fine scale specifically to lithographic patterning methods. The transfer of a pattern or image from one medium to another, as from a mask to a wafer, with image features in the micro meter range or smaller.
Microlithography related journals
Journal of Biochips and Tissue Chips, Journal of Bioengineering & Biomedical Science, Journal of Biomimetics Biomaterials and Tissue Engineering, Journal of Tissue Science & Engineering, Biosensors Journal, International Journal of Biomedical Engineering and Technology, Journal of Bioscience and Bioengineering, Journal of Biomedical Engineering, Biotechnology and Bioengineering, American Journal of Biomedical Engineering.