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Thin films of microcrystalline silicon (µc-Si) were deposited by (LPCVD: Low Pression Chemical Vapour Deposition) to realise Au-µcSi Schottky diodes which are powerful devices to determine several µc-Si characteristic parameters which are never obtained with simple layers without serious difficulties. Therefore, good quality Schottky devices have been successfully made and present an excellent reproducibility.Read more....
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