To realize a reduced fuel consumption of civil jet transport aircrafts, hybrid laminar flow control (HLFC) is a key technology in aerospace industry. For drag reduction caused by boundary layer suction, small holes at the leading edges of the aircraft wings and tail planes are needed. Much effort has been spend in drilling of small holes into different materials. Nevertheless, the economically drilling of small holes in the range of 50 to 100 μm in diameter on large areas is up to date crucial. Apart from processing time this is also due to the demand of close tolerances in case of suction holes.