alexa Thin metal oxide films in acoustic wave based chemical sensors

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Thin metal oxide films in acoustic wave based chemical sensors

Acoustic wave chemical sensors (AWCS) has attracted considerable interest of the sensor community because of several features such as high resolution and sensitivity, fast response time, superb overall stability and high dynamic range. They can be classified in three main categories: sensors utilizing surface, bulk and guided acoustic waves. These waves are mechanical vibrations excited in piezoelectric crystals, where the wave velocity of propagation matches the velocity of sound in solids, hence the name acoustic. Generally, surface acoustic waves (SAWs) are generated by means of two interdigital transducers (IDT), which are interlocking comb-shaped metal electrode devices with a certain finger periodicity, situated on a piezoelectric substrate. By applying a RF signal, whose frequency matches the IDT’s synchronous frequency, the former is converted into a mechanical vibration with maximum efficiency.

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