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A delay line configuration or two-port resonator (illustrated on figure 1) fabricated on temperature compensated cut of piezoelectric quartz, typically ST-cut for SAW and AT-cut for STW for minimum temperature sensitivity at room temperature, is coated with a thin metal oxide sensitive layer and mounted in a sensor head. This sensing film features physical sorption, which means that has the ability to sorbe gas molecules if a gas-analyte of interest is applied to it. Subsequently, when the gas is flushed away with dry air from the sensor head, all sorbed gas molecules will restlessly escape from the layer. During the gas sorption, the sensitive film becomes heavier leading to an increased mass loading on the sensor’s surface. As a result, the acoustic wave propagation velocity decreases and a mass dependent resonance frequency downshift Δf, referred to as “sensor signal”, is observed. Read more
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