alexa Correlation of Mechanical Properties with Surface Morp
ISSN ONLINE(2319-8753)PRINT(2347-6710)

International Journal of Innovative Research in Science, Engineering and Technology
Open Access

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Research Article

Correlation of Mechanical Properties with Surface Morphology of Diamond-Like Carbon Films Deposited By Plasma Enhanced Chemical Vapour Deposition Technique

S. Mahanti1, Rishi Sharma2, Ashwini Kr. Singh3, Neelima Sharma4, S. K. Pradhan5, P. K. Barhai6
  1. Ph. D. Student, Department of Materials and Metallurgical Engineering, Indian Institute of Technology, Kanpur, India
  2. Assistant Professor, Department of Physics, Birla Institute of Technology, Mesra, Ranchi, India
  3. Jr. Scientific Officer, Department of Physics, Birla Institute of Technology, Mesra, Ranchi, India
  4. Assistant Professor, Department of Pharmaceutical Science and Technology, Birla Institute of Technology Mesra, Ranchi, India
  5. Scientist, Institute of Minerals and Materials Technology, CSIR, Bhubaneswar, Odisha, India
  6. Professor, Department of Physics, Birla Institute of Technology, Mesra, Ranchi, India
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Abstract

Diamond like carbon (DLC) films are deposited on glass substrates by using radio frequency plasma enhanced chemical vapour deposition technique with the variation of RF power. DLC films are deposited by using argon and acetylene plasma, at pressure 5×10-2 mbar for 60 minutes. Various properties like surface morphology, hydrophobicity, nanohardness, and structural properties are studied by using atomic force microscope, contact angle measurement setup, nano-hardness tester and Raman spectrometer, respectively. Systematic variation in surface morphology with RF power has been observed. It has been observed that the morphology of the films is correlated with the hardness, sp3 content, roughness, and contact angle. Observed results have been explained using Raman spectra.

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