Polydimethylsiloxane (PDMS) microfluidics devices were created using the procedures for rapid prototyping of PDMS microfluidic systems . These steps included: spin-coating a single layer of SU-8 (SU-8 2035, Micro-Chem Corp., Newton, MA) onto a silicon wafer, (2) creating a photo-pattern via UV radiation exposure, developing photoresist and leaving a master, vapor-treating the surface with tridecafluorooctyltrichlorosilane and vacuum-casting the PDMS solution, curing the PDMS layer at 150°C and then releasing it from the SU-8 master, and plasma-treating and bonding the PDMS microfluidics device to a glass slide.
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Last date updated on June, 2023