alexa Design of a Vertical Cavity Optical Micro- Electromechanical Filter
ISSN ONLINE(2320-9801) PRINT (2320-9798)

International Journal of Innovative Research in Computer and Communication Engineering
Open Access

OMICS International organises 3000+ Global Conferenceseries Events every year across USA, Europe & Asia with support from 1000 more scientific Societies and Publishes 700+ Open Access Journals which contains over 50000 eminent personalities, reputed scientists as editorial board members.

Open Access Journals gaining more Readers and Citations

700 Journals and 15,000,000 Readers Each Journal is getting 25,000+ Readers

This Readership is 10 times more when compared to other Subscription Journals (Source: Google Analytics)

Research Article

Design of a Vertical Cavity Optical Micro- Electromechanical Filter

 
To read the full article Peer-reviewed Article PDF image

Abstract

Based on Micro-Opto-Electro-Mechanical System (MOEMS) technology, vertical cavity devices with an air-gap enable very efficient ultra-wide continuous tuning with only a single control parameter. The vertical cavity filters and Lasers consist of an air-gap cavity embedded between two highly reflective Bragg mirrors. Vertical Cavity Surface Emitting Lasers (VCSELs) have an active layer additionally integrated in the cavity. The ultra-wide continuous tuning is achieved by micro-electromechanical actuation of the mirror membranes. Our research activities concentrated on Bragg mirror material system with InP/air-gap mirror structures. The resonator quality depends on the refractive index contrast between the Bragg mirror layer materials and on the number of periods. The advantage of the semiconductor/air-gap system is the very high refractive index contrast ensuring a high reflectivity of more than 99.8% with only three layer periods. The semiconductor/air-gap structures forming the membranes of one Bragg mirror are n-doped while the other mirror membranes are p-doped forming a diode structure. Due to device miniaturization very efficient tuning is achieved by electrostatic actuation. The investigations presented focus on an InP/air-gap Fabry-Pérot-filter for air =1.55μm with an air-gap cavity thickness equal to a multiple of ½ air embedded between two InP/air Bragg mirrors. The InP membranes have a thickness of of ¾ InP, the air-gaps in between are ¼ï¬air thick. The tuning behaviour is determined by the mechanical flexibility of the membranes and by the optical properties of the vertical cavity. The electrostatic deflection due to a reverse voltage is calculated with FEM simulations incorporating the effect of stress in the membranes. The results of the model calculations compared very well with measured values. This study describes the optical micro-electromechanical design of the novel low cost device structure applicable in optical filters, vertical cavity surface emitting lasers (VCSELs) and a host of other optical applications. We also present a solution to one of the most challenging problems in the design of micro-electromechanical devices consisting of thin-walled structures - that is residual stress. Residual stress alters device characteristics if not taken into consideration during design and characterisation.

Keywords

Share This Page

Additional Info

Loading
Loading Please wait..
Peer Reviewed Journals
 
Make the best use of Scientific Research and information from our 700 + peer reviewed, Open Access Journals
International Conferences 2017-18
 
Meet Inspiring Speakers and Experts at our 3000+ Global Annual Meetings

Contact Us

Agri, Food, Aqua and Veterinary Science Journals

Dr. Krish

[email protected]

1-702-714-7001 Extn: 9040

Clinical and Biochemistry Journals

Datta A

[email protected]

1-702-714-7001Extn: 9037

Business & Management Journals

Ronald

[email protected]

1-702-714-7001Extn: 9042

Chemical Engineering and Chemistry Journals

Gabriel Shaw

[email protected]

1-702-714-7001 Extn: 9040

Earth & Environmental Sciences

Katie Wilson

[email protected]

1-702-714-7001Extn: 9042

Engineering Journals

James Franklin

[email protected]

1-702-714-7001Extn: 9042

General Science and Health care Journals

Andrea Jason

[email protected]

1-702-714-7001Extn: 9043

Genetics and Molecular Biology Journals

Anna Melissa

[email protected]

1-702-714-7001 Extn: 9006

Immunology & Microbiology Journals

David Gorantl

[email protected]

1-702-714-7001Extn: 9014

Informatics Journals

Stephanie Skinner

[email protected]

1-702-714-7001Extn: 9039

Material Sciences Journals

Rachle Green

[email protected]

1-702-714-7001Extn: 9039

Mathematics and Physics Journals

Jim Willison

[email protected]

1-702-714-7001 Extn: 9042

Medical Journals

Nimmi Anna

[email protected]

1-702-714-7001 Extn: 9038

Neuroscience & Psychology Journals

Nathan T

[email protected]

1-702-714-7001Extn: 9041

Pharmaceutical Sciences Journals

John Behannon

[email protected]

1-702-714-7001Extn: 9007

Social & Political Science Journals

Steve Harry

[email protected]

1-702-714-7001 Extn: 9042

 
© 2008-2017 OMICS International - Open Access Publisher. Best viewed in Mozilla Firefox | Google Chrome | Above IE 7.0 version
adwords